PBN heater & electrostatic chuck
Achieves excellent dimensional stability and temperature reproducibility even at ultra-high temperatures above 1000℃! A composite of PBN and PG using advanced technology.
Momentive's "PBN Heater" and "High-Temperature Electrostatic Chuck (ESC)" are composites that utilize advanced technologies of electrically insulating pyrolytic boron nitride (PBN) and conductive pyrolytic graphite (PG). Their characteristics of high purity and very low outgassing even at high temperatures are derived from chemical vapor deposition at elevated temperatures. High thermal conductivity and anisotropy provide excellent in-plane uniformity. 【Features】 ■ Ultra-high temperature compatibility (1500°C) ■ Dimensional stability and electrical stability ■ Ability to create temperature gradients on the heater surface ■ Capable of rapid heating and cooling *For more details, please refer to the catalog. Feel free to contact us with any inquiries.
- Company：モメンティブ・テクノロジーズ・ジャパン
- Price：Other
